What's Included
- Integrated spectrometer/light source unit
- fiber optic cable
- 4", 6" and 200mm wafer reflectance standards
- TS-SiO2-4-7200 Thickness standard
- BK7 reflectance standard
- Flattening filter (for highly-reflective substrates)
- Vacuum pump
- Spare TH-1 lamp
Model Specifications
Model | Thickness Range* | Wavelength Range |
---|---|---|
F50 | 20nm-70µm | 380-1050nm |
F50-UV | 5nm-40µm | 190-1100nm |
F50-NIR | 100nm-250µm | 950-1700nm |
F50-EXR | 20nm-250µm | 380-1700nm |
F50-UVX | 5nm-250µm | 190-1700nm |
F50-XT | 0.2µm-450µm | 1440-1690nm |
F50-s980 | 4µm-1mm | 960-1000nm |
F50-s1310 | 7µm-2mm | 1280-1340nm |
F50-s1550 | 10µm-3mm | 1520-1580nm |
Thickness Range*
Additional Perks
- Library with over 130 materials included with every system, along with access to 100s more
- Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
- Online "Hands On" support (internet connection required)
- Hardware upgrade program
Common Optional Accessories
- NIST-traceable thickness standard
- F50 chucks - 100mm, 200mm, 300mm, and 450mm (F50-450 req’d for 450mm chuck)
- F50 small spot option, VIS or UV